Technology for Micro and Nano Electronics

Ingegneria Elettronica Technology for Micro and Nano Electronics

0622400015
DIPARTIMENTO DI INGEGNERIA INDUSTRIALE
ELECTRONIC ENGINEERING
2014/2015

YEAR OF COURSE 2
YEAR OF DIDACTIC SYSTEM 2012
SECONDO SEMESTRE
CFUHOURSACTIVITY
660LESSONS
Objectives
KNOWLEDGE AND UNDERSTANDING
UNDERSTANDING OF DESIGN CRITERIA OF ELECTRONICS CIRCUITS AND DEVICES, OF THE CORRELATIONS BETWEEN TECHNOLOGY PROCESSES AND DEVICES PERFORMANCES THROUGH A DEEP UNDERSTANDING OF THE MODELS AND LIMITS OF THE FABRICATION TECHNOLOGIES. ANALYSIS AND MODELLING OF COMPLEX PHYSICAL PHENOMENA TO UNDERSTAND THE OPERATION OF ELECTRONICS DEVICES.
APPLYING KNOWLEDGE AND UNDERSTANDING
DESIGNING ELECTRONICS CIRCUITS AND DEVICES WITH A PROPER SETTING OF MICROELECTRONICS PROCESS PARAMETERS ACCORDING TO THE SPECIFICATIONS UTILIZING CAD.
KNOWING HOW TO ANALYSE EXPERIMENTAL RESULTS UTILIZING ELECTRICAL MODELS.
MAKING JUDGEMENTS
UTILISING THE ACQUIRED KNOWLEDGE TO FORMULATE SOLUTIONS OF PROBLEMS ALSO INVOLVING OTHERS DISCIPLINES
COMMUNICATION SKILLS
GROUP WORKING SKILLS, DEVELOPING AN ELECTRONICS PROJECT, CLEARLY SETTING THE LIMITS AND PROBLEMS ASSOCIATED
LEARNING SKILLS
UTILISING THE ACQUIRED KNOWLEDGE AND SKILLS TO APPLY EMERGING TECHNOLOGIES TO SOLVE PROBLEMS, ALSO IN NEW CONTEXTS AND WITH NEW MATERIALS.
Prerequisites
ADVANCED KNOWLEDGE OF ANALOGUE AND DIGITAL ELECTRONICS ARE REQUIRED FOR THE SUCCESSFUL ACHIEVEMENT OF THE LEARNING OUTCOMES OF THE COURSE.
Contents
INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS (ITRS)). ELEMENTS OF QUANTUM MECHANICS. LOW DIMENSIONAL SYSTEMS AND QUANTUM STRUCTURES. EPITAXIAL GROWTH. SILICON DIOXIDE. CHEMICAL VAPOUR DEPOSITION (CVD), RF AND MAGNETRON SPUTTERING CHARACTERIZATION TECHNIQUES FOR MATERIALS AND THIN FILMS THEORY. NANOELECTRONICS AND INFORMATION TECHNOLOGY. DEPOSITION TECHNIQUES FOR NANODEVICES; NEW MATERIALS. CHARACTERIZATION AND MANIPULATION TECHNIQUES OF NANOMATERIALS. ADVANCED MODELS OF LECTRONIC DEVICES. QUANTUM EFFECTS IN MOSFETS. QUANTUM EFFECTS IN INNOVATIVE ARCHITECTURE OF DEVICES: SINGLE ELECTRON DEVICES. PROCESSES AND DEVICES SIMULATORS. CONJUGATED AND SEMICONDUCTOR POLYMERS. OPTICAL PHENOMENA IN SEMICONDUCTING POLYMERS. LIGHT EMITTING DIODE, SOLAR CELLS. REALIZATION AND DIRECT PRINT TECHNIQUES. THIN FILM TRANSISTOR AND OLED DISPLAYS. L ELECTRONIC AND NANOELECTRONIC SENSOR: THIN FILM AND ELECTRONIC NOSE. NANOTECNOLOGY MEDICAL APPLICATION: NANOSENSORS AND BIOSENSORS, LAB-ON-CHIP FOR DNA DETECTION. PHOTONIC APPLICATION OF NANOCLUSTERS.
Teaching Methods
THE COURSE COVERS LECTURES, CLASSROOM EXERCISES AND HANDS-ON LABORATORY ACTIVITIES . DURING CLASSROOM EXERCISES ANALYTICAL MODEL TO SIMULATE ACTUAL PROCESSES AND TO ANALYSE EXPERIMENTAL DATA. CAD SIMULATORS WILL BE USED TO DESIGN PROCESSES AND DEVICES. FABRICATION AND CHARACTERIZATION TOOLS WILL BE USED
Verification of learning
THE EVALUATION OF THE ACHIEVEMENT OF THE EXPECTED OUTCOMES WILL BE CARRIED OUT WITH A WRITTEN TEST AND A PROJECT DESIGN. TO PASS THE EXAM THE STUDENT MUST DEMONSTRATE THAT HE IS ABLE TO UNDERSTAND AND KNOW HOW TO APPLY THE MAIN CONCEPTS EXPRESSED IN THE COURSE. THE FINAL MARK, OUT OF THIRTY (THE MAXIMUM IS THIRTY CUM LAUDE), DEPENDS ON THE MASTERING ABILITY OF THE COURSE CONTENTS, TAKING INTO ACCOUNT THE QUALITY OF THE WRITTEN AND ORAL REPORTING AND THE JUDGEMENT ABILITY DEMONSTRATED
Texts
LECTIRE NOTES. RICHARD C. JAEGER “INTRODUCTION TO MICROELECTRONIC FABRICATION: VOLUME 5 OF MODULAR SERIES ON SOLID STATE DEVICES, 2/E”, PRENTICE HALL. S.WOLF “ PROCESS TECNOLOGY” VOL. 1 LATTICE PRESS. G. SONCINI “TECNOLOGIE MICROELETTRONICHE” BORINGHERI. S. WOLF “ PROCESS INTEGRATION” VOL. 2 LATTICE PRESS. YUAN TAUR, TAK H. NING:”FUNDAMENTS OF MODERN VLSI DEVICES”, CAMBRIDGE, UNIVERSITY PRESS. G.HADZIIOANNOU, G.G. MALLIARAS “SEMICONDUCTING
More Information
THE COURSE IS DELIVERED AT THE FACULTY OF ENGINEERING. ATTENDANCE ON THE COURSE IS COMPULSORY. PLEASE LOOK UP INTO THE FACULTY WEBSITE (HTTP://WWW.INGEGNERIA.UNISA.IT/) FOR THE INDICATION OF THE TIMETABLE AND OF THE CLASSROOM.
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